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Handbook of Advanced Plasma Processing Techniques
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TecnologíaISBN | 9783540667728

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Product details
Pages: 653 pages
Author: S. J. Pearton, R.J. Shul
Publisher: Springer
ISBN: 9783540667728
Format: tapa dura
Language: en
Release date: 1/10/2000
ISBN: 9783540667728
Synopsis of Handbook of Advanced Plasma Processing Techniques
El 'Handbook of Advanced Plasma Processing Techniques' es una guía exhaustiva sobre las técnicas avanzadas de procesamiento de plasma. Publicado en octubre de 2000, este libro de tapa dura de 653 páginas explora las aplicaciones industriales de las descargas luminiscentes y el plasma etching. Cubre temas como la física del plasma, la ciencia de los materiales y la ingeniería mecánica, ofreciendo una visión profunda del diseño y la construcción de circuitos integrados y la ingeniería de plasma.
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