by Thomas M. Adams · tapa blanda · ISBN 9781489984210
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«Introductory MEMS: Fabrication and Applications» is the technical manual by Thomas M. Adams and Richard A. Layton (Springer, paperback, 460 pp., English).
Introduction to microelectromechanical systems (MEMS): explains the most common fabrication techniques and the resulting devices. Covers MEMS transducers, their modeling, commercialized devices and microfluidics, and includes laboratory exercises and review material, with applications in engineering, medicine and electronics.
Work originally published in 2010; this paperback edition is from September 2014.
For advanced undergraduate and postgraduate students and engineering and electronics professionals who need a practical foundation in MEMS technology.
