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MEMS/NEMS Sensors: Fabrication and Application
by Goutam Koley · MDPI AG · tapa blanda · 242 pages
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Pages: 242 pagesAuthor: Goutam KoleyPublisher: MDPI AGFormat: tapa blandaLanguage: enRelease date: 20/11/2019ISBN: ISBN 9783039216345
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Synopsis of MEMS/NEMS Sensors: Fabrication and Application
Este libro técnico explora el desarrollo y las aplicaciones en constante expansión de los sistemas micro y nanoelectromecánicos (MEMS/NEMS) como sensores y actuadores. A través de diversos esquemas de excitación y lectura, estos dispositivos transducen cambios en parámetros físicos —como la temperatura, la masa o el estrés— en señales eléctricas procesables. La obra recopila artículos especializados que cubren ejemplos comunes y avanzados, incluyendo sensores de presión, acelerómetros, sensores de campo magnético, micrófonos y sensores de radiación. Es una edición impresa del número especial publicado en la revista científica Micromachines, editada por Goutam Koley, ideal para profesionales e investigadores en ingeniería y tecnología.
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